CCQM-SAWG Task Group on Chimical Metrology for 2D materials (CCQM-SAWG-TG-CM2D)

Terms of Reference

2D materials such as graphene, boron nitride, and metal dichalcogenides have been identified in the International Technology Roadmap for Semiconductors as components in future electronic devices. The development of industrial processes to manufacture devices from 2D materials will require measurements that are sensitive to individual atomic layers.

The aim of the task group is to identify activities that SAWG should undertake to develop and improve chemical metrology for 2D materials. This includes engagement with stakeholders, identification of measurands and the identification of cooperative research activities, pilot studies and key comparisons. To accomplish this, the TG will:

• Liaise with external stakeholders to list the important needs and gaps in 2D material metrology and identify those that can be addressed by SAWG.
• Collate the measurands that are important for 2D materials and examine the current state of accuracy and traceability for those measurands.
• Propose activities that can be carried out by SAWG and convene relevant NMIs and stakeholders to propose activities, such as pilot studies, that can be carried out.

The TG on 2D materials will report back to SAWG on progress in April 2026 and, upon conclusion of its activities, provide a written report before April 2027.