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Results
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RMO comparison
Linked comparison
EURAMET.L-S26
Metrology area, Sub-field Length, Dimensional Metrology
Description Depth of v-shaped grooves
Time of measurements 2016 - 2018
Status Approved
Final Reports of the comparisons
References

EURAMET.L-S26 Technical Protocol

Measurand Groove depth at 900 µm, 600 µm, 200 µm, 50 µm, 20 µm and 5 µm
Transfer device One PTB 900 µm depth setting standard and three SiMetrics silicon depth setting standards
Comparison type Supplementary Comparison
Consultative Committee CCL (Consultative Committee for Length )
Conducted by EURAMET (European Association of National Metrology Institutes)
RMO Internal Identifier EURAMET 1407
Comments
 
Pilot institute PTB
Physikalisch-Technische Bundesanstalt
Germany
Contact person Uwe Brand

+49 531 592 5100
First Name Last Name
wwww@ww.www +356719836 Institute 1 Institute 1 Khmelnitskiy
Pilot laboratory
PTB

Physikalisch-Technische Bundesanstalt, Germany, EURAMET

BEV

Bundesamt für Eich- und Vermessungswesen, Austria, EURAMET

CEM

Centro Español de Metrologia, Spain, EURAMET

GUM

Glowny Urzad Miar, Central Office of Measures, Poland, EURAMET

INRIM

Istituto Nazionale di Ricerca Metrologica, Italy, EURAMET

NMISA

National Metrology Institute of South Africa, South Africa, AFRIMETS

UME

TÜBITAK Ulusal Metroloji Enstitüsü, Türkiye, EURAMET

VNIIMS

Russian Scientific Research Institute for Metrological Service, Rosstandart, Russian Federation, COOMET

Comparison
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Results
Comparison
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Results