Metrology area, Sub-field | Length, Dimensional Metrology |
Description | Step height standards |
Time of measurements | 2008 - 2009 |
Status | Approved |
Final Reports of the comparisons | |
Measurand | Step height: between 7 nm and 2000 nm |
Transfer device | Same step height transfer standards as for supplementary comparison EUROMET.L-S15, plus two 1D gratings of 300 nm and 700 nm |
Comparison type | Supplementary Comparison |
Consultative Committee | CCL (Consultative Committee for Length ) |
Conducted by | EURAMET (European Association of National Metrology Institutes) |
RMO Internal Identifier | EUROMET Project No 925 |
Comments |
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Pilot institute |
PTB
Physikalisch-Technische Bundesanstalt Germany |
Contact person | H.-U. Danzebrink +49 531 592 5136 |
Pilot laboratory | |
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PTB |
Physikalisch-Technische Bundesanstalt, Germany, EURAMET |
CMI |
Czech Metrology Institute, Czechia, EURAMET |
INRIM |
Istituto Nazionale di Ricerca Metrologica, Italy, EURAMET |
MIKES |
VTT Technical Research Centre of Finland Ltd, Centre for Metrology/Mittatekniikan keskus, Finland, EURAMET |
NMC, A*STAR |
National Metrology Centre, Agency for Science, Technology and Research, Singapore, APMP |
VSL |
VSL, Netherlands, EURAMET |
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