| Metrology area, Sub-field | Length, Dimensional Metrology |
| Description | Step height standards |
| Time of measurements | 2008 - 2009 |
| Status | Approved |
| Final Reports of the comparisons | |
| Measurand | Step height: between 7 nm and 2000 nm |
| Transfer device | Same step height transfer standards as for supplementary comparison EUROMET.L-S15, plus two 1D gratings of 300 nm and 700 nm |
| Comparison type | Supplementary Comparison |
| Consultative Committee | CCL (Consultative Committee for Length ) |
| Conducted by | EURAMET (European Association of National Metrology Institutes) |
| RMO Internal Identifier | EUROMET Project No 925 |
| Comments |
|
| Pilot institute |
PTB
Physikalisch-Technische Bundesanstalt Germany |
| Contact person | H.-U. Danzebrink +49 531 592 5136 |
| Pilot laboratory | |
|---|---|
| PTB |
Physikalisch-Technische Bundesanstalt, Germany, EURAMET |
| CMI |
Czech Metrology Institute, Czechia, EURAMET |
| INRIM |
Istituto Nazionale di Ricerca Metrologica, Italy, EURAMET |
| MIKES |
VTT Technical Research Centre of Finland Ltd, Centre for Metrology/Mittatekniikan keskus, Finland, EURAMET |
| NMC, A*STAR |
National Metrology Centre, Agency for Science, Technology and Research, Singapore, APMP |
| VSL |
VSL, Netherlands, EURAMET |
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