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Results
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Results
Comparison
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RMO comparison
Linked comparison
EUROMET.L-S15.a
Metrology area, Sub-field Length, Dimensional Metrology
Description Step height standards
Time of measurements 2008 - 2009
Status Approved
Final Reports of the comparisons
Measurand Step height: between 7 nm and 2000 nm
Transfer device Same step height transfer standards as for supplementary comparison EUROMET.L-S15, plus two 1D gratings of 300 nm and 700 nm
Comparison type Supplementary Comparison
Consultative Committee CCL (Consultative Committee for Length )
Conducted by EURAMET (European Association of National Metrology Institutes)
RMO Internal Identifier EUROMET Project No 925
Comments

 

 

Pilot institute PTB
Physikalisch-Technische Bundesanstalt
Germany
Contact person H.-U. Danzebrink
Hans-Ulrich.Danzebrink@ptb.de
+49 531 592 5136
First Name Last Name
wwww@ww.www +356719836 Institute 1 Institute 1 Khmelnitskiy
Pilot laboratory
PTB

Physikalisch-Technische Bundesanstalt, Germany, EURAMET

CMI

Czech Metrology Institute, Czechia, EURAMET

INRIM

Istituto Nazionale di Ricerca Metrologica, Italy, EURAMET

MIKES

VTT Technical Research Centre of Finland Ltd, Centre for Metrology/Mittatekniikan keskus, Finland, EURAMET

NMC, A*STAR

National Metrology Centre, Agency for Science, Technology and Research, Singapore, APMP

VSL

VSL, Netherlands, EURAMET

Comparison
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Results
Comparison
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Results