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CIPM MRA PARTICIPANTS

The KCDB - the BIPM key comparison database – supports the CIPM MRA. The KCDB contains information on the internationally recognized Calibration and Measurement Capabilities (CMCs) for services available from the participating institutes, and the key and supplementary comparisons supporting these CMCs.

All data listed in the KCDB have been reviewed and approved within the CIPM Mutual Recognition Arrangement

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CIPM MRA PARTICIPANTS

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EURAMET.L-S5.1.n01

Information & contact
Participants

Metrology area, Sub-field	Length, Dimensional Metrology
Description	Comparison on nanometrology standards
Time of measurements	2025 - 2026
Status	Planned

Measurand	Grating pitch, p Step height, h Nominal values: p =278 nm and p =3000 nm h = 20 nm and h = 100 nm
Transfer device	Gratings (3 pieces)

Comparison type	Supplementary Comparison
Consultative Committee	CCL (Consultative Committee for Length )
Conducted by	EURAMET (European Association of National Metrology Institutes)
Comments	At its meeting in October 2024, the EURAMET Technical Committee for length, TC-L, decided upon a supplementary comparison on nanometrology standards (grating pitch and step height) in the range 300 nm to 3 µm (grating pitch) and 20 nm to 100 nm (step height), with VTT as the pilot laboratory. A goal of the supplementary comparisons for topics in dimensional metrology is to demonstrate the equivalence of routine calibration services offered by NMIs to clients, as listed in Appendix C of the Mutual Recognition Agreement (MRA).
Pilot institute	MIKES VTT Technical Research Centre of Finland Ltd, Centre for Metrology/Mittatekniikan keskus Finland
Contact person	Virpi Korpelainen +358504105504

Pilot laboratory
MIKES	VTT Technical Research Centre of Finland Ltd, Centre for Metrology/Mittatekniikan keskus, Finland, EURAMET

BEV	Bundesamt für Eich- und Vermessungswesen, Austria, EURAMET

CEM	Centro Español de Metrologia, Spain, EURAMET

CMI	Czech Metrology Institute, Czechia, EURAMET

DFM	Danish Fundamental Metrology A/S, Denmark, EURAMET

GUM	Glowny Urzad Miar, Central Office of Measures, Poland, EURAMET

INRIM

Istituto Nazionale di Ricerca Metrologica, Italy, EURAMET

LNE	Laboratoire national de métrologie et d'essais, France, EURAMET

NPL	National Physical Laboratory, United Kingdom, EURAMET

SMD	Service de la Métrologie Belge, Belgium, EURAMET

UME	TÜBITAK Ulusal Metroloji Enstitüsü, Türkiye, EURAMET

VSL	VSL, Netherlands, EURAMET