Comparison
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Results
Comparison
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Results
Comparison
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RMO comparison
Linked comparison
EURAMET.L-S28
Metrology area, Sub-field Length, Dimensional Metrology
Description Flatness of surface plates
Time of measurements 2020 - 2021
Status Protocol complete
References

EURAMET.L-S28 Technical Protocol

Measurand Flatness deviation
Transfer device Optical flat with a diameter of 330 mm made of Zerodur
Comparison type Supplementary Comparison
Consultative Committee CCL (Consultative Committee for Length )
Conducted by EURAMET (European Association of National Metrology Institutes)
RMO Internal Identifier EURAMET 1490
Comments

This is a comparison of flatness measurements of an optical flat on an aperture of 300 mm diameter.
The participants have to measure the inner part of 300 mm with optical instruments to avoid possible scratches on the surface when measuring with tactile instruments. The achievable measurement uncertainty of the flatness measurements should be less than 15 nm (k=2).

Pilot institute PTB
Physikalisch-Technische Bundesanstalt
Germany
Contact person Gerd EHRET
Gerd.Ehret@ptb.de
First Name Last Name
wwww@ww.www +356719836 Institute 1 Institute 1 Khmelnitskiy
Pilot laboratory
PTB

Physikalisch-Technische Bundesanstalt, Germany, EURAMET

NIM

National Institute of Metrology, China, APMP

NMIJ AIST

National Metrology Institute of Japan, Japan, APMP

NMISA

National Metrology Institute of South Africa, South Africa, AFRIMETS

VNIIM

D.I. Mendeleyev Institute for Metrology, Rosstandart, Russian Federation, COOMET

Comparison
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Results
Comparison
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Results