Results for: Standard particle, particle size d
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In the CMCs uncertainty statements, the notation Q[a, b] stands for the root-sum-square of the terms between brackets: Q[a, b] = [a 2 + b 2]1/2
Unless otherwise stated the expanded uncertainties given below correspond to k = 2 (at a 95 % level of confidence)
Germany, PTB (Physikalisch-Technische Bundesanstalt)
Various dimensional , Reference materials : 7 nm to 300 nm
Standard particle, particle size d
Absolute expanded uncertainty : 2.2 nm to 8 nm
2 nm + 0.02 d
Scanning Electron Microscopy in Transmission Mode (TSEM)
Approved on 12 September 2016
Institute service identifier : PTB/4.22/3
Switzerland, METAS (Federal Institute of Metrology)
Various dimensional , Reference materials : 1 µm to 200 µm
Standard particle: particle size, d
Absolute expanded uncertainty : 1.8E-2 µm to 3.6 µm
0.007 µm + 0.011 d (for d <= 40 µm);
0.015 µm + 0.018 d (for d > 40 µm) d, particle size
2-D mask comparator and CCD microscope
Shape : spherical
Approved on 19 February 2022
Institute service identifier : METAS/72

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